XRays and Extreme Ultraviolet Radiation 9781107062894 David Attwood Boeken


Soft XRays and Extreme Ultraviolet Radiation Principles and

Summary: "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering.


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Publisher's summary. This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant.


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It is a region where there are a large number of atomic resonances, leading to absorption of radiation in very short distances, typically measured in nanometers (nm) or micrometers (microns, ยตm), in all materials. This has historically inhibited the pursuit and exploration of the region.


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Summary The X-Ray and Extreme Ultraviolet Regions of the Electromagnetic Spectrum One of the last regions of the electromagnetic spectrum to be developed is that extending from the extreme ultraviolet to hard x-rays, generally shown as a dark region in charts of the spectrum.


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INTRODUCTION 1 1.1 The Soft X-Ray and Extreme Ultraviolet Regions of the Electromagnetic Spectrum 1 1.2 Basic Absorption and Emission Processes 5 1.3 Atomic Energy Levels and Allowed Transitions 10 1.4 Scattering, Diffraction, and Refraction of Electromagnetic Radiation 18 References 21 Homework Problems 23 CHAPTER 2.


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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy.


Soft XRays and Extreme Ultraviolet Radiation Principles and Applications by David Attwood

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy.


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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy.


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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Chapter 6 Homework Problems 6.1 Describe the basic features of microscopic, kinetic, and uid descriptions of a plasma. Give examples of phenomena that require these di erent levels of description.


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Soft x-rays and extreme ultraviolet radiation : principles and applications / David Attwood. p. cm. Includes bibliographical references. ISBN -521-65214-6 (hbk.) 1. Grenz rays. 2. Ultraviolet radiation. I. Title. QC482.G68A88 1999 539.70222 - dc21 99-21078 CIP ISBN


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X-Rays and Extreme Ultraviolet Radiation Principles and Applications. Search within full text. Get access.. 'A very clear, comprehensive and updated presentation of the basic physical properties and applications of XUV and X-ray radiation. I highly recommend the book for graduate students and anyone working in this fast growing field of.


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X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Authors: David Attwood Anne Sakdinawat Download citation Abstract With this fully updated second edition, readers will gain a.


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With this fully updated second edition, you will gain a detailed understanding of the physics and applications of modern x-ray and extreme ultraviolet (EUV) radiation sources.


XRays and Extreme Ultraviolet Radiation 9781107062894 David Attwood Boeken

"There has been a remarkable improvement in capabilities for probing matter with x-rays and extreme ultraviolet (EUV) radiation since the previous edition of this book appeared in 2000. The spectral brightness and coherence of available research facilities has increased by many orders of magnitude across the EUV and x-ray spectral regions, extending from photon energies of 30 eV (40 nm.


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Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications. Search within full text. Get access. Buy a print copy Check if you have access via personal or institutional login.. Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions. IEEE Journal of Quantum Electronics, Vol. 35, Issue. 5, p. 709.